Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A theoretical framework for comparing binding energies and activation energies for adsorption on surfaces based on the effective medium theory is presented. It is applied to a microscopic description of the mechanisms underlying the promotion and poisoning of the molecular adsorption process on metal surfaces by co-adsorbed species. Based on self-consistent calculations of the electronic structure of adsorbed electropositive and electronegative atoms, estimates of the range and strength of this so-called electronic factor in heterogeneous catalysis are made which are in good agreement with recent experimental studies. © 1984.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
John G. Long, Peter C. Searson, et al.
JES
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009