Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A theoretical framework for comparing binding energies and activation energies for adsorption on surfaces based on the effective medium theory is presented. It is applied to a microscopic description of the mechanisms underlying the promotion and poisoning of the molecular adsorption process on metal surfaces by co-adsorbed species. Based on self-consistent calculations of the electronic structure of adsorbed electropositive and electronegative atoms, estimates of the range and strength of this so-called electronic factor in heterogeneous catalysis are made which are in good agreement with recent experimental studies. © 1984.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
T. Schneider, E. Stoll
Physical Review B
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011