Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In this work, a new method for mesh simplification and surface reconstruction specifically designed for the needs of CAD/CAM engineering design and analysis is introduced. The method simplifies the original free-form face mode by first constructing restricted curvature deviation regions, generating a boundary conforming finite dement quadrilateral mesh of the regions, and then fitting a smooth surface over the quadril ateral mesh using the plate energy method. It is more general in scope than existing methods because it handles modes with free-form faces and non-manifold geometry, not just triangular or polygonal faces. It produces a high-quality quadrilateral mesh which is suited for both finite element analysis and CAD/CAM. The smooth surface obtained by energy functional stabilization over limited curvature regions preserves the number of quadrilateral dements, and is best suited for surface modeling. The method is illustrated by building of several free-form surfaces from an arbitrary topology mesh. © 1998 Elsevier Science Ltd. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Anupam Gupta, Viswanath Nagarajan, et al.
Operations Research
Matthias Kaiserswerth
IEEE/ACM Transactions on Networking
Yao Qi, Raja Das, et al.
ISSTA 2009