Michael F. Toney, Carol Thompson
The Journal of Chemical Physics
We report x-ray reflectivity measurements on ultrathin (∼250 Å) amorphous carbon films and show that for film thicknesses of a few hundred angstroms this is an extremely effective, accurate, and nondestructive technique for measuring the thickness, density, and microscopic surface roughness. These properties are difficult to accurately measure using other methods. However, since they affect the functional performance of these films and are dependent on preparation conditions, their determination is particularly important.
Michael F. Toney, Carol Thompson
The Journal of Chemical Physics
Bing K. Yen, Birgit E. Schwickert, et al.
Applied Physics Letters
Michael F. Toney, Wen-Yaung Lee, et al.
Journal of Applied Physics
Michael F. Toney, Ting C. Huang, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films