Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We present a family of Maximum-Distance Separable (MDS) array codes of size (p - 1) × (p - 1), p a prime number, and minimum criss-cross distance 3, i.e., the code is capable of correcting any row or column in error, without a priori knowledge of what type of error occurred. The complexity of the encoding and decoding algorithms is lower than that of known codes with the same error-correcting power, since our algorithms are based on exclusive-OR operations over lines of different slopes, as opposed to algebraic operations over a finite field. We also provide efficient encoding and decoding algorithms for errors and erasures.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Kento Tsubouchi, Yosuke Mitsuhashi, et al.
npj Quantum Information
Khaled A.S. Abdel-Ghaffar
IEEE Trans. Inf. Theory
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering