Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Paper
Matrix inversion for the GR method in surface scattering
Abstract
The GR method developed hy Garcia depends critically on the inversion of a matrix defining the solution of a system of linear equations. The different ways of matrix inversion and possible singularities are discussed. © 1985.
Related
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Conference paper
Soft x-ray diffraction of striated muscle
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Julien Autebert, Aditya Kashyap, et al.
Langmuir