Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In the last decade of the twentieth century, we saw great progress in the mathematical sciences as well as changes in the activities of the mathematical scientist. These included the resolution of some well-known conjectures, the introduction of new areas of study, as well as the adoption of new tools and new methods of operation. The IBM Research Division was an active participant in many of these events. We discuss here a selection of these, focusing on some to which contributions were made by mathematicians at IBM Research.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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I-SPAN 2002
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VLDB