Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We investigated (Bi, Al)-doped Dy3Fe5O12/T (T = Fe, Co, Dy) multilayer thin films prepared by magnetron sputtering and subsequent processing by multipulse rapid thermal annealing. These multilayer garnet samples have very square hysteresis loops, large coercivity and nanoscale size grains. Large effective Kerr rotations were found in the blue wavelength region. © 1995.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Peter J. Price
Surface Science
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989