IEEE Transactions on Magnetics

Magnetics and Microstructure of Sputtered Ni80, Fe20/SiO2 Multilayere Films

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Multilayered Ni80Fe20/SiO2 films have been produced by sputter deposition. The effects of lamination on the bulk magnetic properties, microstructure and high frequency permeability of stacks with various Ni80Fe20 and SiO2 thicknesses were investigated. In general, laminated films with a total magnetic thickness of I.5,μm had significantly lower Hc and extended frequency response compared to unlaminated films of the same magnetic thickness. In addition the impact of lamination on domain configuration of yoke shaped structures was determined and excellent agreement with micromagnetic theoretical prediction obtained. © 1990 IEEE