William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Imran Nasim, Melanie Weber
SCML 2024
J. Tersoff
Applied Surface Science