Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Nonlinear electrical conduction effects arising from local heating provide a means for detecting the presence of latent defects that are at risk of becoming open electronic circuits under stress. A special choice of ac drive current results in a dc intermodulation signal produced by nonlinear conduction, and offers several practical advantages over previous techniques involving ac harmonics. A key feature is the use of digital signal processing to provide speed, accuracy, and flexibility of measurement. A manufacturing screening system involving an automated prober integrated with the defect-detection tool is used to test high-performance glass-ceramic substrate interconnects used in advanced microelectronic packaging. © 2005 IBM.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Yvonne Anne Pignolet, Stefan Schmid, et al.
Discrete Mathematics and Theoretical Computer Science
Leo Liberti, James Ostrowski
Journal of Global Optimization
Minkyong Kim, Zhen Liu, et al.
INFOCOM 2008