Laser cleaning of surface contaminants

Abstract

Laser cleaning effect can be produced on a surface using pulsed laser irradiation, with pulse duration typically 1 to 100 ns, fluence typically tens to hundreds of mJ/cm 2 , and wavelengths typically in the 200 to 300 nm range. A thin liquid film can be used to enhance the removal efficiency of small particulates; this is called 'steam laser cleaning'. A manufacturing-worthy tool that can provide both steam laser cleaning as well as dry laser cleaning is built and tested successfully. The basic mechanism of steam laser cleaning is studied. © 1998 Elsevier Science B.V.