Soft x-ray diffraction of striated muscle
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
A large-field scanning imaging system has been developed to perform imaging ablation using 308-nm excimer laser light. A 1 x Dysonlike lens images a portion of the mask onto a portion of the substrate to be ablated. The lens has a field of 12 mm and a numerical aperture of 0.05, providing a resolution of about 6 μm. A mirror system comprising a roof and a plane mirror, with all three surfaces mutually orthogonal, ensures that the mask and the substrate have identical orientations. A common stage is used to hold the mask and the substrate. The stage is scanned in a serpentine manner to transfer the entire image. The illuminated region is diamond-shaped, and adjacent scans overlap by half its width to ensure uniformity. Illumination uniformity is provided by a light tunnel in the illumination system. Alignment is performed by optically combining images of mask marks and substrate marks formed by a pair of microscope objectives, one viewing the mask and the other viewing the substrate. The substrate is leveled, focused, and registered relative to the image of the mask by a stage with six degrees of freedom.
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Xiaozhu Kang, Hui Zhang, et al.
ICWS 2008
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Yun Mao, Hani Jamjoom, et al.
CoNEXT 2006