H. Rothuizen, M. Despont, et al.
MEMS 2009
No abstract available.
H. Rothuizen, M. Despont, et al.
MEMS 2009
B. Gotsmann, H. Fuchs
Applied Surface Science
A. Sebastian, D. Wiesmann, et al.
TRANSDUCERS 2009
A.W. Knoll, D. Wiesmann, et al.
Journal of Nanoscience and Nanotechnology