PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsPaperKinetic theory of laser photochemical depositionJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jan 1987PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsAuthorsC. Julian ChenIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare