Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The basic concepts of screw coordinates described in Part I are applied to the numerical kinematic analysis of spatial mechanisms. The techniques are illustrated with reference to the displacement, velocity, and static-force-and-torque analysis of a general, single-degree-of-freedom spatial mechanism: a seven-link mechanism with screw pairs (H)7. By specialization the associated computer program is capable of analyzing many other single-loop spatial mechanisms. Numerical examples illustrate the results. © 1971 ASME.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Chi-Leung Wong, Zehra Sura, et al.
I-SPAN 2002
Khaled A.S. Abdel-Ghaffar
IEEE Trans. Inf. Theory
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007