Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The basic concepts of screw coordinates described in Part I are applied to the numerical kinematic analysis of spatial mechanisms. The techniques are illustrated with reference to the displacement, velocity, and static-force-and-torque analysis of a general, single-degree-of-freedom spatial mechanism: a seven-link mechanism with screw pairs (H)7. By specialization the associated computer program is capable of analyzing many other single-loop spatial mechanisms. Numerical examples illustrate the results. © 1971 ASME.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Minkyong Kim, Zhen Liu, et al.
INFOCOM 2008
N.K. Ratha, A.K. Jain, et al.
Workshop CAMP 2000
B.K. Boguraev, Mary S. Neff
HICSS 2000