Publication
Applied Physics Letters
Paper

Ionic species in a silane plasma

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Abstract

The abundances Aj of groups of higher silane ions Si jH+k were measured mass spectrometrically in an rf glow discharge in SiH4 under conditions used for preparation of hydrogenated amorphous silicon. The ratio Aj/Aj-1 is about 0.3 nearly independently of j, of pressure, of degree of ionization, and of rf power. The mean hydrogen to silicon ratio for j≥3 is 1.5±0.1 and pressure independent in the 0.017-0.100-Torr range. A mechanism postulating charge or hydride ion transfer and the addition of SiH4 as the most rapid reactions of silane ions is consistent with the observations.

Date

22 Jul 2008

Publication

Applied Physics Letters

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