Publication
INTERMAG 2002
Conference paper

Ion projection printing for patterning of magnetic media

Abstract

Feasibility of ion projection printing for full disk surface processing was investigated. The influence of different ion species and ion energies on the Co/Pt interfaces was evaluated by Monte Carlo simulations. In a single exposure step several tracks within an exposure field of 17.5 mm in diameter were magnetically structured by projecting 45 keV He+ at a 4-fold demagnification.