Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The general relations between the internal strain vector and the strain tensor are used to derive the conditions for internal strain, in the diamond structure. Both the transverse and longitudinal internal strains have been measured, and the results of Part I improved. The experimental results on germanium and silicon are in good agreement with the theory of internal strain. © 1965 Springer-Verlag.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics
K.N. Tu
Materials Science and Engineering: A
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999