Integrated optical planar waveguide components

Abstract

Planar optical waveguides for applications in communication networks can be fabricated using conventional chip-manufacturing techniques. We present a planar optical waveguide technology that is based on a silicon-oxynitride (SiON) core and silicon-oxide cladding layers. In addition to more compact, conventional optical devices, it also enables enhanced optical functions such as dynamically reconfigurable planar integrated optical devices. Examples of adaptive devices realized in this technology include finite and infinite impulse response (FIR and IIR) filters.