Publication
Journal of Applied Physics
Paper

Infrared thermal particle detection physics

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Abstract

Thermal particle detection is a new approach to the detection of generic particulate contaminants on products. The method takes advantage of the low thermal conductivity of a particle/substrate interface by using rapid thermal heating to raise the particle temperature over the temperature of its surroundings. The perturbed particle is then detected by its subsequent thermal emissions with a highly sensitive IR detector. The physics of particle heating and detection both in vacuum and in air is described.

Date

01 Dec 1986

Publication

Journal of Applied Physics

Authors

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