R.L. Melcher, E. Pytte, et al.
Physical Review Letters
Thermal particle detection is a new approach to the detection of generic particulate contaminants on products. The method takes advantage of the low thermal conductivity of a particle/substrate interface by using rapid thermal heating to raise the particle temperature over the temperature of its surroundings. The perturbed particle is then detected by its subsequent thermal emissions with a highly sensitive IR detector. The physics of particle heating and detection both in vacuum and in air is described.
R.L. Melcher, E. Pytte, et al.
Physical Review Letters
R.L. Melcher
ULTSYM 1970
R.L. Melcher
International Conference on Laser Processing and Diagnostics 1983
N.S. Shiren, R.L. Melcher, et al.
IEEE JQE