Infrared thermal particle detection physics

Abstract

Thermal particle detection is a new approach to the detection of generic particulate contaminants on products. The method takes advantage of the low thermal conductivity of a particle/substrate interface by using rapid thermal heating to raise the particle temperature over the temperature of its surroundings. The perturbed particle is then detected by its subsequent thermal emissions with a highly sensitive IR detector. The physics of particle heating and detection both in vacuum and in air is described.