Influence of bottom contact material on the selective chemical vapor deposition of crystalline GeSbTe alloys

Abstract

Selective Chemical Vapor Deposition of Crystalline Ge-Sb-Te alloys initiating at the bottom metal contact of vias of various sizes has been accomplished. The method is based on selecting Sb and Te precursors which do not decompose on dielectric surfaces in the utilized temperature range. © 2010 Materials Research Society.