Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
Selective Chemical Vapor Deposition of Crystalline Ge-Sb-Te alloys initiating at the bottom metal contact of vias of various sizes has been accomplished. The method is based on selecting Sb and Te precursors which do not decompose on dielectric surfaces in the utilized temperature range. © 2010 Materials Research Society.
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
Eloisa Bentivegna
Big Data 2022
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering