Improved performance of large stroke comb-drive actuators by using a stepped finger shape

In this work we describe an electrostatic mass-balanced planar x/y-scanner, using an optimized comb finger shape, designed for parallel-probe storage applications. We show a new stepped comb finger shape design, that has superior force/displacement characteristics leading to a larger stroke at the same voltage and a larger available force compared to straight or tapered shapes. ©2009 IEEE.