Joachim N. Burghartz, Arturo O. Cifuentes, et al.
IEEE Transactions on Electron Devices
An experiment to determine the effect of gate electrode resistivity on circuit speed gave unexpected results: circuits with the lowest sheet resistance had the poorest circuit speed. Explanation of this behavior required development of a new high-frequency method of measuring the impedance of the gate electrode. This method revealed that the circuits with a composite gate electrode had been formed with a partial discontinuity. The measurement technique is described, and the evidence of the discontinuity is shown. The effect of the discontinuity on device and circuit speed is demonstrated. © 1996 IEEE.
Joachim N. Burghartz, Arturo O. Cifuentes, et al.
IEEE Transactions on Electron Devices
Damon B. Farmer, Hsin-Ying Chiu, et al.
Nano Letters
Yanqing Wu, Damon Farmer, et al.
IEDM 2011
Joachim N. Burghartz, Mehmet Soyuer, et al.
IEEE T-MTT