Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
A. Skumanich
SPIE OE/LASE 1992