Hiroyuki Hiraoka, Adolfo R. Gutierrez
JES
A few micron wide and thick polymer lines are formed from a monomer, methacrylic anhydride, according to a metal pattern of a mask under high-energy radiation, such as γ rays. The resolution is limited only by the mask configuration; with our present mask configuration it is better than ∼2000 Å. The polymerization is initiated by electrons ejected from metal lines.
Hiroyuki Hiraoka, Adolfo R. Gutierrez
JES
Hiroyuki Hiraoka, Edward Gipstein, et al.
Journal of Applied Polymer Science
Hiroyuki Hiraoka, Tsuguo Yamaoka
Microelectronic Engineering
Haruo Shizuka, Hiroshi Hiratsuka, et al.
Journal of Physical Chemistry