Publication
Applied Physics Letters
Paper

High-resolution polymer replication of surface topography

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Abstract

A few micron wide and thick polymer lines are formed from a monomer, methacrylic anhydride, according to a metal pattern of a mask under high-energy radiation, such as γ rays. The resolution is limited only by the mask configuration; with our present mask configuration it is better than ∼2000 Å. The polymerization is initiated by electrons ejected from metal lines.

Date

26 Aug 2008

Publication

Applied Physics Letters

Authors

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