High-resolution polymer replication of surface topography

Abstract

A few micron wide and thick polymer lines are formed from a monomer, methacrylic anhydride, according to a metal pattern of a mask under high-energy radiation, such as γ rays. The resolution is limited only by the mask configuration; with our present mask configuration it is better than ∼2000 Å. The polymerization is initiated by electrons ejected from metal lines.