J. Alexander Liddle, Gregg M. Gallatin, et al.
MRS Proceedings 2002
The equation for partially coherent high-numerical-aperture scalar imaging was originally derived by Cole et al. [Jpn. J. Appl. Phys. 31, 4110 (1992)]. Here I present an alternative derivation, based on the plane-wave spectral representation of propagation, which can, at least in some respects, be viewed as more straightforward. © 2001 Optical Society of America.
J. Alexander Liddle, Gregg M. Gallatin, et al.
MRS Proceedings 2002
Patrick P. Naulleau, Gregg M. Gallatin
Applied Optics
Dario L. Goldfarb, Arpan P. Mahorowala, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Gregg M. Gallatin
SPIE Advanced Lithography 2005