Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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SPIE Advanced Lithography 2007
We consider the High-Multiplicity Cyclic Job Shop Scheduling Problem. There are two objectives of interest: the cycle time and the flow time. We give several approximation algorithms after showing that a very restricted case is APX-hard. © 2008 Elsevier B.V. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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