Publication
Review of Scientific Instruments
Paper

Heater for high Tc oxide superconducting thin-film deposition

View publication

Abstract

A design for a heater stage capable of operating in a high oxygen partial pressure is presented. Substrates attached to the stage may be heated up to 900 °C in oxygen partial pressures from 10-3 to 760 Torr. The design of the heater allows easy replacement of all parts.

Date

01 Dec 1991

Publication

Review of Scientific Instruments

Authors

Share