Epitaxial films of gallium-substituted yttrium iron garnet displaying magnetic domains have been grown on gadolinium gallium garnet and mixed gadolinium dysprosium gallium garnet substrates. The films grown on Dy: GGG were crack-free. A chemical-vapor-deposition (CVD) system using metal source materials and a simplified geometry was developed. Investigations were made of several different types of growth which occurred and of the efficiency of HCl transport. Results of these studies, as well as magnetic properties of the films and a description of the CVD system and growth conditions, are presented. © 1971 The American Institute of Physics.