Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
From a molecular dynamics experiment of an unstable two-dimensional fluid undergoing phase separation, we observe two principal growth regimes; (1) spinodal decomposition with a wavelike morphology followed by (2) a transition to cluster formation and growth due to atomic condensation and cluster coagulation. In the second regime the growth law is t 1 2. This dependence arises from the isothermal growth law for vapor accretion on two-dimensional clusters in a 'onerd component supersaturated vapor. The details of theoretical analysi that leads to t 1 2 growth law are presented. © 1983.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Mark W. Dowley
Solid State Communications