Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A general class of algorithms for the numerical solution of partial differential equations is considered. The structure and properties of the algorithms make them particularly easy to implement. Numerical comparisons of the algorithms are included. © 1971 by Academic Press Inc. (London) Limited.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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