Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Angular and velocity distributions have been obtained for the scattering of argon and N2 from a W(100) surface for incidence energies, Ei, in the range 0.03-5.5 eV, and surface temperatures, Ts, from 90 to 1700 K. For Ei < 0.1 eV, we find broad angular distributions (> 60° FWHM) which are relatively insensitive to Ts and velocity distributions which are inconsistent with parallel momentum conservation, indicating a relatively corrugated interaction potential. Increasing Ei first causes a rapid narrowing in these distributions, but as Ei exceeds ~ 2 eV, they broaden again, as the effective corrugation again becomes large. © 1988.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009