Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Igor Devetak, Andreas Winter
ISIT 2003
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994