About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
Electrochimica Acta
Paper
Fundamental aspects and applications of electrochemical microfabrication
Abstract
The theory and applications of electrochemical microfabrication technology are reviewed focusing on electrodeposition and dissolution processes. Electrochemical microfabrication offers some unique advantages over competing vapor phase technologies and therefore finds increasing use in the electronics and microsystems industries. The present paper discusses the underlying principles of electrochemical microfabrication processes. The important role of mass transport and current distribution is stressed and it is shown how numerical modeling contributes to the present understanding of critical process parameters. The application of electrochemical microfabrication technology in the electronics industry is illustrated with selected examples. © 2000 Elsevier Science Ltd. All rights reserved.