William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Paper
Finite width foil bearing with light loading
Abstract
The paper describes and illustrates a procedure for computing the deflection of a foil bearing due to a finite width bump when the load is light enough that perturbations of the foil position can be ignored insofar as solution of the Reynolds equation is concerned. © 1975 by ASME.
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