Field emission scanning auger microscope (Fesam)

Abstract

We have measured the energy distribution of backscattered electrons originating from a tungsten field emission tip positioned several hundred μm above an oxidized Si wafer. Energy loss spectroscopy (ELS) and Auger electron spectroscopy (AES) are shown to be feasible in this manner. Hence we suggest a simple scanning type of microscope yielding electronic-structure information with a spatial resolution in the submicron range similar as e.g. scanning Auger microscopy and employing the piezoelectric translation technology of scanning tunneling microscopy. © 1987 Elsevier Science Publishers B.V. (North-Holland Physics Publishing Division).