Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sai Zeng, Angran Xiao, et al.
CAD Computer Aided Design
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
György E. Révész
Theoretical Computer Science