R. Berndt, J.K. Gimzewski, et al.
Zeitschrift für Physik D Atoms, Molecules and Clusters
The fabrication of magnetic elements containing constrictions is demonstrated using nanostencil lithography in dynamic mode, i.e., by a continuous translation of a shadow mask with respect to the sample. The authors quantify the current resolution limits of this technique, demonstrating edge profile widths of 120 nm and thickness variations of 10%, and discuss prospects and challenges of dynamic nanostencil lithography. © 2007 American Institute of Physics.
R. Berndt, J.K. Gimzewski, et al.
Zeitschrift für Physik D Atoms, Molecules and Clusters
R. Berndt, R. Gaisch, et al.
Physical Review Letters
R.R. Schlittler, J.K. Gimzewski
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
B. Reihl, R.R. Schlittler, et al.
Physical Review Letters