Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Michael C. McCord, Violetta Cavalli-Sforza
ACL 2007
Rolf Clauberg
IBM J. Res. Dev
György E. Révész
Theoretical Computer Science