Nanoporous materials integration into advanced microprocessors
E. Todd Ryan, Cathy Labelle, et al.
MRS Spring Meeting 2005
Atomistic calculations using the Stillinger-Weber interatomic potential show that stress relaxation can lower the energy of a Si(100) stepped surface below that of the flat surface. Two types of elastic interactions are identified: One is due to stress anisotropy which occurs only on single-stepped surfaces and has a logarithmic dependence on ledge separation l; the other is associated with ledge rebonding, present in both single- and double-stepped surfaces, and has a variation of l-2. On the vicinal Si(001), single-layer ledges are predicted to be favored over double-layer ledges at low miscut angles with the crossover occurring at about 1°at zero temperature, and at 3°at 500 K, in agreement with experiment. © 1990 The American Physical Society.
E. Todd Ryan, Cathy Labelle, et al.
MRS Spring Meeting 2005
Paul S. Ho
JVSTA
Paul S. Ho, Thomas Kwok, et al.
Scripta Metallurgica
Ravi F. Saraf, Ho‐Ming Tong, et al.
Journal of Applied Polymer Science