Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
No abstract available.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Frank R. Libsch, S.C. Lien
IBM J. Res. Dev
S. Sattanathan, N.C. Narendra, et al.
CONTEXT 2005
Robert G. Farrell, Catalina M. Danis, et al.
RecSys 2012