Publication
Proceedings of the IEEE
Paper

Electron-Beam Systems for Precision Micron and Submicron Lithography

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Abstract

This paper discusses the engineering of electron-beam sys tems for the generation of micron and submicron lithography. Design objectives and options for the electron-beam column, X-Y workpiece stage, laser interferometer, pattern generator, software, and general engineering are the major topics. Copyright © 1983 by The Institute of Electrical and Electronics Engineers, Inc.v

Date

01 Jan 1983

Publication

Proceedings of the IEEE

Authors

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