PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsPaperElectrical properties of vacuum annealed Si surfacesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jul 1987PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsAuthorsJ. WernerM. RenierR.A. WachnikG.S. ScillaP.S. HoIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare
