Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
01 Jul 1987

Electrical properties of vacuum annealed Si surfaces

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Abstract

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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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Date

01 Jul 1987

Publication

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Authors

  • J. Werner
  • M. Renier
  • R.A. Wachnik
  • G.S. Scilla
  • P.S. Ho
IBM-affiliated at time of publication

Topics

  • Physical Sciences
  • Materials Discovery

Resources

  • Publication

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