Thomas R. Puzak, A. Hartstein, et al.
CF 2007
This paper presents a dual-stage approach to nanopositioning in which the tradeoff between the scanner speed and range is addressed by combining a slow, large-range scanner with a short-range scanner optimized for high-speed, high-resolution positioning. We present the design, finite-element simulations, and experimental characterization of a fast custom-built short-range scanner. The short-range scanner is based on electromagnetic actuation to provide high linearity, has a clean, high-bandwidth dynamical response and is equipped with a low-noise magnetoresistance-based sensor. By using advanced noise-resilient feedback controllers, the dual-stage system allows large-range positioning with subnanometer closed-loop resolution over a wide bandwidth. Experimental results are presented in which the dual-stage scanner system is used for imaging in a custom-built atomic force microscope. © 1996-2012 IEEE.
Thomas R. Puzak, A. Hartstein, et al.
CF 2007
Sonia Cafieri, Jon Lee, et al.
Journal of Global Optimization
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Xiaozhu Kang, Hui Zhang, et al.
ICWS 2008