Microlithography 2000
Conference paper

Dissolution/swelling behavior of cycloolefin polymers in aqueous base


Polycycloolefins prepared by addition polymerization of norbornene derivatives are quite different from hydroxystyrene-based polymers in terms of their interaction with aqueous base. Their dissolution kinetics monitored on a quartz crystal microbalance is not a smooth function of the ratio of the polar and nonpolar functionalities in polymer but abruptly changes from very fast dissolution to massive swelling within a narrow range of composition. The maximum swelling is a function of thickness and the entire film thickness can swell in a few seconds at >3,000 A/sec or at immeasurably fast rates. Other behaviors of cycloolefin polymers in aqueous base are discussed.