P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
It is shown that the technologies required to produce large normal-incidence multilayer x-ray mirrors with diffraction-limited resolution are now available. Applications of these mirrors in x-ray astronomy and x-ray lithography are discussed. © 1994 by Academic Press, Inc.
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A. Gangulee, F.M. D'Heurle
Thin Solid Films
T.N. Morgan
Semiconductor Science and Technology
John G. Long, Peter C. Searson, et al.
JES