J.C. Marinace
JES
It is shown that the technologies required to produce large normal-incidence multilayer x-ray mirrors with diffraction-limited resolution are now available. Applications of these mirrors in x-ray astronomy and x-ray lithography are discussed. © 1994 by Academic Press, Inc.
J.C. Marinace
JES
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films