S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Paper
Defects in amorphous hydrogenated silicon nitride films
Abstract
In this paper we review the structural identification and electronic properties of the K- and N-centers, and positive charges in as-deposited and UV-illuminated amorphous silicon nitride thin films. © 1993.
Related
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
Oliver Schilter, Alain Vaucher, et al.
Digital Discovery
M. Hargrove, S.W. Crowder, et al.
IEDM 1998