Benjamin W. Chui, Thomas W. Kenny, et al.
IMECE 1997
No abstract available.
Benjamin W. Chui, Thomas W. Kenny, et al.
IMECE 1997
Charles T. Rettner, Simone Anders, et al.
IEEE Transactions on Magnetics
Benjamin W. Chui, Timothy D. Stowe, et al.
JMEMS
Hans Loeschner, Gerhard Stengl, et al.
Journal of Microlithography, Microfabrication and Microsystems