Conference paperInterface state generation in pFETs with ultra-thin oxide and oxynitride on (100) and (110) Si substratesJ.H. Stathis, R. Bolam, et al.INFOS 2005
PaperAutomated search method for AFM and profilersMichael Ray, Yves C. MartinProceedings of SPIE - The International Society for Optical Engineering
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