Richard L. White, Bing K. Yen, et al.
American Society of Mechanical Engineers, Tribology Division, TRIB
The study of coverage and properties of amorphous silicon nitride (a-SiNx) overcoats deposited on magnetic disks by rf-reactive sputtering was presented. It was found by the use of x-ray photoelectron spectroscopy that amorphous silicon nitride has a low coverage-limit of ∼10 Å. It was concluded that the superior performance of a-SiNx disk overcoat may be attributed to its high hardness and dense structure.
Richard L. White, Bing K. Yen, et al.
American Society of Mechanical Engineers, Tribology Division, TRIB
Qing Dai, Bing K. Yen, et al.
IEEE Transactions on Magnetics
Bing K. Yen, Richard L. White, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Qing Dai, Guillermo Prada-Silva, et al.
IEEE Transactions on Magnetics